Bowman W-Series

The W Series Micro XRF uses poly-capillary optics to focus the X-ray beam to 7.5 µm FWHM, the world’s smallest beam size for coating thickness analysis using XRF technology. A 150X magnification camera is used to measure features on that scale; it is accompanied by a secondary, low-magnification camera for live-viewing samples and birds-eye macro-view imaging. Bowman’s dual-camera system lets operators see the entire part, click the image to zoom with the high-mag camera, and pinpoint the feature to be programmed and measured.

A programmable X-Y stage with precision less than +/- 1 µm for each axis is used to select and measure multiple points; Bowman pattern recognition software and auto-focus features also do this automatically. The system’s 3D mapping capability can be used to view the topography of a coating on a part such as a silicon wafer.

The standard configuration of W Series instruments includes 7.5 µm optics with molybdenum anode tube (chromium and tungsten are optional) and a high-resolution, large-window Silicon Drift Detector which processes more than 2 million counts per second.

• The need to test wafers, lead frames, PCBs
• Requirements to quickly test multiple samples or locations
• Desire to automate measurement on multiple samples
• The need to comply with IPC-4552A, 4553A, 4554 and 4556
• ASTM B568, DIN 50987 and ISO 3497